00490nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245004000116260003200156300002000188490003300208856010300241IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819400543 (Print)  cIIA Library  aGuenther, Karl, ed. 0aThin Film Technologies IIIh[eBook]  aWashington, USAbSPIEc1989  aOnline resource  aProceedings of SPIE; V. 1019  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1019yClick Here to Access eBook