00538nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245009000114260003200204300002000236490003300256856010300289IN-BaIIA211028s9999 xx s 000 0 eng d a9780819462282 (Print) cIIA Library aGeer, Robert, ed. 0aTesting, Reliability, and Application of Micro- and Nano-Material Systems IVh[eBook] aWashington, USAbSPIEc2006 aOnline resource aProceedings of SPIE; V. 6175 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6175yClick Here to Access eBook