@book{33094,
	author = {Geer, Robert, ed.},
	title = {Testing, Reliability, and Application of Micro- and Nano-Material Systems III},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5766},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5766}
}