@book{33093,
	author = {Meyendorf, Norbert, ed.},
	title = {Testing, Reliability, and Application of Micro- and Nano-Material Systems II},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5392},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5392}
}