TY  - BOOK
AU  - Marrian, Christie R. K., ed.
TI  - Technology of Proximal Probe Lithography
T2  - Proceedings of SPIE; V. 10310
SN  - 9781510610682 (Online)
PY  - 1993///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10310
ER  -