00516nam a2200145Ia 4500003000900000008004100009020002700050040001600077100003300093245005400126260003200180300002000212490003400232856010400266IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510610682 (Online)  cIIA Library  aMarrian, Christie R. K., ed. 0aTechnology of Proximal Probe Lithographyh[eBook]  aWashington, USAbSPIEc1993  aOnline resource  aProceedings of SPIE; V. 10310  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10310yClick Here to Access eBook