@book{32998,
	author = {Marrian, Christie R. K., ed.},
	title = {Technology of Proximal Probe Lithography},
	publisher = {SPIE},
	year = {1993},
	series = {Proceedings of SPIE; V. 10310},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10310}
}