00765nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003400092245008300126260003200209300002000241490003300261856010300294942000700397999001700404952016200421IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892520671 (Print)  cIIA Library  aConverse, William, ed.948212 0aTechnological Advances in Micro and Submicro Photofabrication Imageryh[eBook]  aWashington, USAbSPIEc1974  aOnline resource  aProceedings of SPIE; V. 0055  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0055yClick Here to Access eBook  cEB  c32954d32954  00104070aBANbBANd2011-07-01eSPIEhV. 55l0pEB12414r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0055w2021-11-05yEB