@book{32954,
	author = {Converse, William, ed.},
	title = {Technological Advances in Micro and Submicro Photofabrication Imagery},
	publisher = {SPIE},
	year = {1974},
	series = {Proceedings of SPIE; V. 0055},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0055}
}