00520nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002000092245007400112260003200186300002000218490003300238856010300271IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819445476 (Print)  cIIA Library  aGu, Zu-Han, ed. 0aSurface Scattering and Diffraction for Advanced Metrology IIh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4780  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4780yClick Here to Access eBook