TY  - BOOK
AU  - Gu, Zu-Han, ed.
TI  - Surface Scattering and Diffraction for Advanced Metrology
T2  - Proceedings of SPIE; V. 4447
SN  - 9780819441614 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4447
ER  -