00517nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002000092245007100112260003200183300002000215490003300235856010300268IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819441614 (Print)  cIIA Library  aGu, Zu-Han, ed. 0aSurface Scattering and Diffraction for Advanced Metrologyh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4447  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4447yClick Here to Access eBook