Gu, Zu-Han, ed. <br/><br/>
Surface Scattering and Diffraction for Advanced Metrology  [eBook] 

 - Washington, USA  SPIE  2001 
 - Online resource 
 - Proceedings of SPIE; V. 4447 .
<br/><br/><label>ISBN: </label>9780819441614 (Print)