@book{32876,
	author = {Gu, Zu-Han, ed.},
	title = {Surface Scattering and Diffraction for Advanced Metrology},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4447},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4447}
}