@book{32875,
	author = {Bennett, Jean, ed.},
	title = {Surface Measurement and Characterization},
	publisher = {SPIE},
	year = {1989},
	series = {Proceedings of SPIE; V. 1009},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1009}
}