TY  - BOOK
AU  - Stover, John, ed.
TI  - Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
T2  - Proceedings of SPIE; V. 3619
SN  - 9780819430892 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3619
ER  -