00538nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245009000114260003200204300002000236490003300256856010300289IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819430892 (Print)  cIIA Library  aStover, John, ed. 0aSurface Characterization for Computer Disks, Wafers, and Flat Panel Displaysh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3619  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3619yClick Here to Access eBook