Stover, John, ed. <br/><br/>
Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays  [eBook] 

 - Washington, USA  SPIE  1999 
 - Online resource 
 - Proceedings of SPIE; V. 3619 .
<br/><br/><label>ISBN: </label>9780819430892 (Print)