TY  - BOOK
AU  - Creath, Kathy, ed.
TI  - Surface Characterization and Testing
T2  - Proceedings of SPIE; V. 0680
SN  - 9780892527151 (Print)
PY  - 1987///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0680
ER  -