@book{32872,
	author = {Creath, Kathy, ed.},
	title = {Surface Characterization and Testing},
	publisher = {SPIE},
	year = {1987},
	series = {Proceedings of SPIE; V. 0680},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0680}
}