TY  - BOOK
AU  - Brillson, Leonard, ed.
TI  - Surface and Interface Analysis of Microelectronic Materials Processing and Growth
T2  - Proceedings of SPIE; V. 1186
SN  - 9780819402226 (Print)
PY  - 1990///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1186
ER  -