00548nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245009500119260003200214300002000246490003300266856010300299IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819402226 (Print)  cIIA Library  aBrillson, Leonard, ed. 0aSurface and Interface Analysis of Microelectronic Materials Processing and Growthh[eBook]  aWashington, USAbSPIEc1990  aOnline resource  aProceedings of SPIE; V. 1186  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1186yClick Here to Access eBook