@book{32871,
	author = {Brillson, Leonard, ed.},
	title = {Surface and Interface Analysis of Microelectronic Materials Processing and Growth},
	publisher = {SPIE},
	year = {1990},
	series = {Proceedings of SPIE; V. 1186},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1186}
}