TY  - BOOK
AU  - Kwok, Thomas, ed.
TI  - Submicrometer Metallization: Challenges, Opportunities, and Limitations
T2  - Proceedings of SPIE; V. 1805
SN  - 9780819410030 (Print)
PY  - 1993///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1805
ER  -