00533nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245008500114260003200199300002000231490003300251856010300284IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819410030 (Print)  cIIA Library  aKwok, Thomas, ed. 0aSubmicrometer Metallization: Challenges, Opportunities, and Limitationsh[eBook]  aWashington, USAbSPIEc1993  aOnline resource  aProceedings of SPIE; V. 1805  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1805yClick Here to Access eBook