Kwok, Thomas, ed. <br/><br/>
Submicrometer Metallization: Challenges, Opportunities, and Limitations  [eBook] 

 - Washington, USA  SPIE  1993 
 - Online resource 
 - Proceedings of SPIE; V. 1805 .
<br/><br/><label>ISBN: </label>9780819410030 (Print)