@book{32853,
	author = {Kwok, Thomas, ed.},
	title = {Submicrometer Metallization: Challenges, Opportunities, and Limitations},
	publisher = {SPIE},
	year = {1993},
	series = {Proceedings of SPIE; V. 1805},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1805}
}