00565nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002500119245007300144260003200217300002000249490003400269856010400303IN-BaIIA211028s9999 xx s 000 0 eng d a9781510631427 (Print) a9781510631434 (Online) cIIA Library aSimpson, Cather, ed. 0aSPIE Micro + Nano Materials, Devices, and Applications 2019h[eBook] aWashington, USAbSPIEc2020 aOnline resource aProceedings of SPIE; V. 11201 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11201yClick Here to Access eBook