TY  - BOOK
AU  - Glembocki, Orest, ed.
TI  - Spectroscopic Characterization Techniques for Semiconductor Technology V
T2  - Proceedings of SPIE; V. 2141
SN  - 9780819414366 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2141
ER  -