00538nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245008600118260003200204300002000236490003300256856010300289IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819414366 (Print)  cIIA Library  aGlembocki, Orest, ed. 0aSpectroscopic Characterization Techniques for Semiconductor Technology Vh[eBook]  aWashington, USAbSPIEc1994  aOnline resource  aProceedings of SPIE; V. 2141  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2141yClick Here to Access eBook