@book{32764,
	author = {Glembocki, Orest, ed.},
	title = {Spectroscopic Characterization Techniques for Semiconductor Technology IV},
	publisher = {SPIE},
	year = {1992},
	series = {Proceedings of SPIE; V. 1678},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1678}
}