@book{32762,
	author = {Pollak, Fred, ed.},
	title = {Spectroscopic Characterization Techniques for Semiconductor Technology II},
	publisher = {SPIE},
	year = {1985},
	series = {Proceedings of SPIE; V. 0524},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0524}
}