TY  - BOOK
AU  - Bauer, Robert, ed.
TI  - Spectroscopic Characterization Techniques for Semiconductor Technology I
T2  - Proceedings of SPIE; V. 0452
SN  - 9780892524877 (Print)
PY  - 1984///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0452
ER  -