@book{32761,
	author = {Bauer, Robert, ed.},
	title = {Spectroscopic Characterization Techniques for Semiconductor Technology I},
	publisher = {SPIE},
	year = {1984},
	series = {Proceedings of SPIE; V. 0452},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0452}
}