TY - BOOK AU - Koch, E., ed. TI - Soft X-Ray Optics and Technology T2 - Proceedings of SPIE; V. 0733 SN - 9780892527687 (Print) PY - 1986/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0733 ER -