00490nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001800092245004600110260003200156300002000188490003300208856010300241IN-BaIIA211028s9999 xx s 000 0 eng d a9780892527687 (Print) cIIA Library aKoch, E., ed. 0aSoft X-Ray Optics and Technologyh[eBook] aWashington, USAbSPIEc1986 aOnline resource aProceedings of SPIE; V. 0733 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0733yClick Here to Access eBook