TY  - BOOK
AU  - Kaiser, Winfried, ed.
TI  - Soft X-Ray and EUV Imaging Systems
T2  - Proceedings of SPIE; V. 4146
SN  - 9780819437914 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4146
ER  -