@book{32580,
	author = {Kaiser, Winfried, ed.},
	title = {Soft X-Ray and EUV Imaging Systems},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4146},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4146}
}