Varadan, Vijay, ed. <br/><br/>
Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology  [eBook] 

 - Washington, USA  SPIE  2006 
 - Online resource 
 - Proceedings of SPIE; V. 6172 .
<br/><br/><label>ISBN: </label>9780819462251 (Print)