TY  - BOOK
AU  - Varadan, Vijay, ed.
TI  - Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
T2  - Proceedings of SPIE; V. 5055
SN  - 9780819448606 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5055
ER  -