00553nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245010300116260003200219300002000251490003300271856010300304IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819448606 (Print)  cIIA Library  aVaradan, Vijay, ed. 0aSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnologyh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5055  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5055yClick Here to Access eBook