@book{32541,
	author = {Varadan, Vijay, ed.},
	title = {Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5055},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5055}
}