00544nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245009400116260003200210300002000242490003300262856010300295IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819444486 (Print)  cIIA Library  aVaradan, Vijay, ed. 0aSmart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnologyh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4700  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4700yClick Here to Access eBook