@book{32524,
	author = {Varadan, Vijay, ed.},
	title = {Smart Structures and Materials 2001: Smart Electronics and MEMS},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4334},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4334}
}