@book{32515,
	author = {Varadan, Vijay, ed.},
	title = {Smart Structures and Materials 2000: Smart Electronics and MEMS},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 3990},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3990}
}