TY  - BOOK
AU  - Varadan, Vijay, ed.
TI  - Smart Structures and Materials 1998: Smart Electronics and MEMS
T2  - Proceedings of SPIE; V. 3328
SN  - 9780819427724 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3328
ER  -