@book{32496,
	author = {Varadan, Vijay, ed.},
	title = {Smart Structures and Materials 1998: Smart Electronics and MEMS},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3328},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3328}
}