@book{32487,
	author = {Varadan, Vijay, ed.},
	title = {Smart Structures and Materials 1997: Smart Electronics and MEMS},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3046},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3046}
}