@book{32479,
	author = {Varadan, Vijay, ed.},
	title = {Smart Structures and Materials 1996: Smart Electronics and MEMS},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2722},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2722}
}