TY - BOOK AU - Fonseca, Luis, ed. TI - Smart Sensors, Actuators, and MEMS VIII T2 - Proceedings of SPIE; V. 10246 SN - 9781510609938 (Print) PY - 2017/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10246 ER -